The response mechanism about electrostatic field and osmolality as well as the applications in artificial worm, chemical valve and bionic actuator are also introduced. 同时介绍了静电场、渗透压等电场敏感水凝胶的响应机理及其在人工爬虫、化学阀和仿生驱动器等方面的应用。
Analysis of Micro Electrostatic Actuator Applying for Phase Change Probe-based Data Storage System 用于探针存储系统的硅微静电驱动器的分析
Research of actuation characteristic of a curved cantilever electrostatic actuator 弯曲悬臂梁静电执行器驱动特性的实验研究
The existing micro electrostatic comb resonators working as actuators can only output little displacement, the authors developed a novel type of micro electrostatic actuator with multi-folded suspensions, which would be able to output large displacement and work in both the static and resonance state. 针对现有微静电梳状谐振器用作驱动器时输出位移极小的弱点,提出一种结构新颖、输出位移大、能工作于谐振状态和静电力状态下的多折叠梁微静电驱动器设计方案。
Design, Analysis, and Simulation of Micro-Electro-Mechanical Digital/ Analog Converter Based on Cantilever Electrostatic Actuator 静电驱动悬臂梁数模转换器设计、分析与模拟
Analysis of electrostatic comb-finger actuator in-plane misalignments Simulation and experiment results on the three-axis table show that the nonlinear initial alignment not only release the constraint on the azimuth error ( within 10 degree), but result in a good estimate. 硅微陀螺梳齿驱动的面内失准分析仿真及转台试验均表明:非线性静基座对准不仅具有很好的对准精度,而且大大放宽了对方位失准角的约束(10°以内即可)。
Research on an Electrostatic Repulsive-Force Based Vertical Micro Actuator 一种基于静电排斥力的纵向微驱动器研究
A horizontal torsion micro mirror with folded springs for MEMS optical switch driven by an electrostatic actuator is designed in this paper. The total length of torsion beams grows longer and driving voltage can be effectively decreased because the straight torsion beams are replaced by the folded springs. 设计了带有折叠弹簧的静电驱动光开关水平扭转微镜,利用折叠弹簧代替直扭梁,增加扭梁的长度,有效降低微镜驱动电压。
The calculation of electrostatic distribution has been carry out for the plasma actuator, which provide numerical value simulation for the design of actuator. 进行了等离子体反应器的静电场分布计算,为等离子体反应器的设计提供了数值模拟。
Electrostatic microactuator has been widely used in many applications such as micro sensor, actuator and controller. 静电微驱动机构在微机械传感器、激励器中有着广泛的应用。
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature. 静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小,成为硅微陀螺仪的主要驱动方式。
Electrostatic self test function of the accelerometer is also realized by integrated actuator. 传感器利用集成在内的静电驱动器,实现电自检测功能。
Actuation technologies of micro-mechanical cantilever are summarized, and formula for capacitance and electrostatic force involving edge-effect of comb-drive actuator are derived. 总结了微机械悬臂梁的静电、压电、热、电磁等驱动技术,推导了计及边缘效应的梳状静电驱动器静电力公式。
The electrostatic actuator with cantilever structure was fabricated based on electrospun PANI nanofiber, and the displacement of PANI cantilever beam under electrostatic force was measured. 基于电纺的PANI纳米纤维,制作了悬臂梁结构的静电执行器,并测试了PANI悬臂梁在静电力作用下的位移。